Improvement of temperature stability of eddy current sensor

被引:0
作者
Huang, YP [1 ]
Ding, TH [1 ]
Chen, XL [1 ]
机构
[1] Tsing Hua Univ, Sensor Lab, Beijing 100084, Peoples R China
来源
PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 3 | 2002年
关键词
eddy current sensor; temperature stability; equivalent impedance; displacement measurement;
D O I
暂无
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Main factors that cause temperature instability of eddy current sensor are analyzed. The factors consist of two parts: the influence of temperature on the equivalent impedance of the sensing coil and the temperature instability of the associated oscillator. According to the analysis, methods are brought out to improve the temperature stability. A novel eddy current sensor for displacement measurement has been developed on a polyimide film with flexible printed circuit board process (FPCB). The sensor consists of a flat coil array and a frequency modulated circuit with the long-term stability of 2 D-4. The temperature coefficient of the sensor is 0.05%FS J1.
引用
收藏
页码:399 / 402
页数:4
相关论文
共 4 条
  • [1] HUA C, 1999, J TSINGHUA U OCT, P65
  • [2] Huang X Q, 2000, INSTRUMENT TECHNOLOG, P3
  • [3] The research of inhomogeneity in eddy current sensors
    Tian, GY
    Zhao, ZX
    Baines, RW
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1998, 69 (02) : 148 - 151
  • [4] A miniaturised sensor for deep hole diameter measurement
    Tian, GY
    Zhao, ZX
    Baines, RW
    Corcoran, P
    [J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1999, 23 (04): : 236 - 242