Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

被引：5
|
作者：
Geng, Guangzhou [1 ]
Zhang, Zhongshan [1 ]
Li, Chensheng [1 ,2 ]
Pan, Ruhao [1 ]
Li, Yunlong [1 ]
Yang, Haifang [1 ,3 ]
Li, Junjie [1 ,2 ,3 ]
机构：
[1] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
[2] Univ Chinese Acad Sci, Sch Phys Sci, Beijing 100049, Peoples R China
[3] Songshan Lake Mat Lab, Dongguan 523808, Peoples R China
来源：
MICROMACHINES | 2022年 / 13卷 / 06期
基金：
中国国家自然科学基金;
关键词：
atomic layer deposition; sacrificial templates; 3D nanostructures; SENSITIZED SOLAR-CELL; ENHANCED PHOTOCATALYTIC ACTIVITY; TIO2 NANOTUBE ARRAYS; INVERSE-OPAL; HOLOGRAPHIC LITHOGRAPHY; SENSING PROPERTIES; PHOTONIC CRYSTALS; CARBON NANOTUBES; BUTTERFLY WINGS; TITANIUM-OXIDE;
D O I：
10.3390/mi13060856
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Reliable fabrication, improved controllability, and multifunction integration are desired for further applications in commercial devices. In this review, a powerful fabrication method to realize 3D nanostructures is introduced and reviewed thoroughly, which is based on atomic layer deposition assisted 3D assembly through various sacrificial templates. The aim of this review is to provide a comprehensive overview of 3D nanofabrication based on atomic layer assembly (ALA) in multifarious sacrificial templates for 3D nanostructures and to present recent advancements, with the ultimate aim to further unlock more potential of this method for nanodevice applications.
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页数：24
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