Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas

被引：1

作者：

Lee, Huijea ^{[1
,2
]}

Kim, Seong Bong ^{[2
]}

Yi, Changho ^{[1
]}

Park, Seungil ^{[2
]}

Yoo, Suk Jae ^{[2
]}

Cho, Moohyun ^{[1
,3
]}

Namkung, Won ^{[4
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Phys, Pohang 790784, South Korea

[2] Natl Fus Res Inst, Plasma Technol Res Ctr, Gunsan 573540, South Korea

[3] Pohang Univ Sci & Technol, Div Adv Nucl Engn, Pohang 790784, South Korea

[4] Pohang Univ Sci & Technol, Pohang Accelerator Lab, Pohang 790784, South Korea

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2015年 / 24卷 / 01期

基金：

新加坡国家研究基金会;

关键词：

plasma confinement; Langmuir probe; ECR plasma; low operating pressure; ECR;

D O I：

10.1088/0963-0252/24/1/015031

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An electron cyclotron resonance plasma source with a belt-type magnet assembly and slit antennas was developed for generating high density plasmas at low operating pressures. To enhance plasma confinement and avoid the disadvantages of quartz windows, a continuous arrangement of magnets and direct microwave injection from the slit antennas without quartz windows was used. This plasma source operated at an argon gas pressure of 0.4-1 mTorr and microwave power of 300-800 W. Electron temperature and ion density are dependent on the radial and axial position.

引用

页数：6

共 21 条

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