Growth and characterization of InAs epitaxial layer on GaAs(111)B -: art. no. 205307

被引:26
作者
Wen, H [1 ]
Wang, ZM [1 ]
Shultz, JL [1 ]
Liang, BL [1 ]
Salamo, GJ [1 ]
机构
[1] Univ Arkansas, Dept Phys, Fayetteville, AR 72701 USA
来源
PHYSICAL REVIEW B | 2004年 / 70卷 / 20期
关键词
D O I
10.1103/PhysRevB.70.205307
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The behavior of InAs deposition on GaAs(111)B substrates and the corresponding routes toward strain relaxation have been investigated. InAs growth was for depositions ranging from 2 monolayers to 30 monolayers. Over this deposition range, different routes for strain relaxation caused by the lattice mismatch were observed. The strain relaxed through ragged step edge formation and Ga-In intermixing for low InAs deposition and through the formation of step bunching and dislocations for thicker depositions.
引用
收藏
页码:205307 / 1
页数:4
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