Study on electromechanical coupling coefficients of surface acoustic waves in layered systems

被引:3
作者
Chen, YY [1 ]
Hsu, JC [1 ]
Wu, TT [1 ]
机构
[1] Natl Taiwan Univ, Inst Appl Mech, Taipei 106, Taiwan
关键词
effective permittivity; electromechanical coupling coefficient;
D O I
10.1080/02533839.2004.9670933
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The aim of this paper is to utilize the effective permittivity approach to calculate the electromechanical coupling coefficients of surface acoustic waves in layered systems. The effective permittivity offers a direct relation to the voltage-induced charge density at the interface, and can be used to calculate the phase velocity dispersion and the electromechanical coupling coefficients of a layered piezoelectric medium exactly. In this paper, the formulation based on the matrix method for calculating the effective permittivity of a layered piezoelectric medium with three types of electrode arrangements is given first. Then, based on this formulation, we calculated phase velocity dispersions of the generalized SAW mode and the HVPSAW mode in layered systems of ZnO/Diamond and LiNbO3/Diamond. In addition, the electromechanical coupling coefficients of surface acoustic waves in the aforementioned layered systems with three different electrical boundary conditions were analyzed and discussed.
引用
收藏
页码:823 / 832
页数:10
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