Noise floor comparison of optical displacement measuring interferometer between air and vacuum environments

被引：0

作者：

Aketagawa, Masato ^{[1
]}

Sakasai, Kousuke ^{[1
]}

Higuchi, Masato ^{[1
]}

Wei, Dong ^{[1
]}

Thanh Dong Nguyen ^{[2
]}

机构：

[1] Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata 9402188, Japan

[2] Hanoi Univ Sci & Technol, Sch Mech Engn, 1 Dai Co Viet Rd, Hanoi, Vietnam

来源：

OPTICAL TECHNOLOGY AND MEASUREMENT FOR INDUSTRIAL APPLICATIONS CONFERENCE 2021 | 2021年 / 11927卷

关键词：

displacement; picometer; noise floor; interferometer; heterodyne; environment; air; vacuum;

D O I：

10.1117/12.2616260

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this presentation, we discuss noise floor comparisons of an optical displacement measuring interferometer between air and vacuum environments. A heterodyne interferometer and its phasemeter. with the resolution of 10(-6) radian, implemented in a field programmable gate array (FPGA) are utilized for the comparison. A heterodyne laser source consists of a frequency stabilized He-Ne laser and two acoustic optic modulators (AGMs). The interferometer optics and a piezoelectric (PZT) flexure stage which drives the moving retroreflector of the interferometer are placed in a vacuum chamber. In the vacuum environment at 3 mPa, the noise floor of 1 pm/root Hz or less is attained in the frequency range of 0.01 similar to 100 Hz.

引用

页数：3

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