Ultrafast Growth of High-Quality Monolayer WSe2 on Au

被引:157
|
作者
Gao, Yang [1 ]
Hong, Yi-Lun [1 ,2 ]
Yin, Li-Chang [1 ]
Wu, Zhangting [3 ]
Yang, Zhiqing [1 ]
Chen, Mao-Lin [1 ,2 ]
Liu, Zhibo [1 ]
Ma, Teng [1 ]
Sun, Dong-Ming [1 ]
Ni, Zhenhua [3 ]
Ma, Xiu-Liang [1 ]
Cheng, Hui-Ming [1 ,4 ]
Ren, Wencai [1 ]
机构
[1] Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Peoples R China
[2] Univ Sci & Technol China, Sch Mat Sci & Engn, 72 Wenhua Rd, Shenyang 110016, Peoples R China
[3] Southeast Univ, Dept Phys, Nanjing 211189, Jiangsu, Peoples R China
[4] Tsinghua Berkeley Shenzhen Inst, Shenzhen 518055, Peoples R China
基金
中国国家自然科学基金;
关键词
chemical vapor deposition; monolayers; ultrafast growth; WSe2; CHEMICAL-VAPOR-DEPOSITION; LARGE-AREA SYNTHESIS; SINGLE-CRYSTAL GRAPHENE; MONO LAYER MOS2; ELECTRONICS; MOBILITY; DOMAINS; GRAINS; FOILS; FILM;
D O I
10.1002/adma.201700990
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The ultrafast growth of high-quality uniform monolayer WSe2 is reported with a growth rate of approximate to 26 mu m s(-1) by chemical vapor deposition on reusable Au substrate, which is approximate to 2-3 orders of magnitude faster than those of most 2D transition metal dichalcogenides grown on nonmetal substrates. Such ultrafast growth allows for the fabrication of millimeter-size single-crystal WSe2 domains in approximate to 30 s and large-area continuous films in approximate to 60 s. Importantly, the ultrafast grown WSe2 shows excellent crystal quality and extraordinary electrical performance comparable to those of the mechanically exfoliated samples, with a high mobility up to approximate to 143 cm(2) V-1 s(-1) and ON/OFF ratio up to 9 x 10(6) at room temperature. Density functional theory calculations reveal that the ultrafast growth of WSe2 is due to the small energy barriers and exothermic characteristic for the diffusion and attachment of W and Se on the edges of WSe2 on Au substrate.
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页数:8
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