共 20 条
[13]
Self-assembled monolayers of alkanethiols on oxidized copper surfaces
[J].
JOURNAL OF PHYSICAL CHEMISTRY B,
2000, 104 (10)
:2273-2277
[14]
Sung MM, 2003, B KOR CHEM SOC, V24, P610
[15]
Sung MM, 2001, B KOR CHEM SOC, V22, P748
[16]
Integration of Single Damascene 85/85 nm US copper trenches in Black Diamond using 193 nm optical lithography with dipole illumination
[J].
PROCEEDINGS OF THE IEEE 2003 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE,
2003,
:171-173
[20]
WHELAN CM, IN PRESS J ELECT MAT