Cathodic Arc Deposition of ZrNbN Coating

被引：4

作者：

Krysina, O. V. ^{[1
]}

Shugurov, V. V. ^{[1
]}

Prokopenko, N. A. ^{[1
]}

Petrikova, E. A. ^{[1
]}

Tolkachev, O. S. ^{[1
]}

Denisova, Yu. A. ^{[1
]}

机构：

[1] Russian Acad Sci, Siberian Branch, Inst High Current Elect, Moscow, Russia

来源：

RUSSIAN PHYSICS JOURNAL | 2019年 / 62卷 / 06期

基金：

俄罗斯科学基金会;

关键词：

cathodic arc deposition; ZrNbN coating; alloying element; arc discharge; properties; nanocrystalline structure; elemental and phase compositions; coefficient of friction; wear resistance; NANOCOMPOSITE COATINGS;

D O I：

10.1007/s11182-019-01801-0

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Cathodic arc deposition is used to produce ZrNbN coating with the different niobium concentration. Investigated are the elemental and phase compositions of the obtained coating, its structure and properties. It is shown that various parameters of niobium cathode discharge modify the elemental composition of ZrNbN coating. The dependencies are obtained for physical-and-mechanical and tribological properties on the niobium concentration in ZrNbN coating. It is shown that the coating with the niobium concentration of 9.8 at.% has the best properties, such as 39.4 GPa hardness, 0.03 mu m roughness, 0.43 friction coefficient and not over 9.4 center dot 10(-6) mm(3)/(N center dot m) wear rate.

引用

页码：956 / 961

页数：6

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