Defect Dominated Charge Transport and Fermi Level Pinning in MoS2/Metal Contacts

被引:191
|
作者
Bampoulis, Pantelis [1 ,2 ,3 ]
van Bremen, Rik [1 ]
Yao, Qirong [1 ]
Poelsema, Bene [1 ]
Zandvliet, Harold J. W. [1 ]
Sotthewes, Kai [1 ]
机构
[1] Univ Twente, MESA Inst Nanotechnol, Phys Interfaces & Nanomat, POB 217, NL-7500 AE Enschede, Netherlands
[2] Univ Twente, MESA Inst Nanotechnol, Phys Fluids, POB 217, NL-7500 AE Enschede, Netherlands
[3] Univ Twente, MESA Inst Nanotechnol, JM Burgers Ctr Fluid Mech, POB 217, NL-7500 AE Enschede, Netherlands
关键词
MoS2; defects; conductive AFM; metal/MoS2; junction; Schottky barrier; Fermi level pinning; transition metal dichalcogenides; 2D semiconductor; TRANSITION-METAL DICHALCOGENIDES; POINT-DEFECTS; INTEGRATED-CIRCUITS; MOS2; TRANSISTORS; GRAPHENE; DOPANTS; BARRIER; STATES;
D O I
10.1021/acsami.7b02739
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Understanding the electronic contact between molybdenum disulfide (MoS2) and metal electrodes is vital for the realization of future MoS2-based electronic devices. Natural MoS2 has the drawback of a high density of both metal and sulfur defects and impurities. We present evidence that subsurface metal-like defects with a density of similar to 10(11) cm(2) induce negative ionization of the outermost S atom complex. We investigate with high-spatial-resolution surface characterization techniques the effect of these defects on the local conductance of MoS2. Using metal nanocontacts (contact area < 6 nm(2)), we find that subsurface metal-like defects (and not S-vacancies) drastically decrease the metal/MoS2 Schottky barrier height as compared to that in the pristine regions. The magnitude of this decrease depends on the contact metal. The decrease of the Schottky barrier height is attributed to strong Fermi level pinning at the defects. Indeed, this is demonstrated in the measured pinning factor, which is equal to similar to 0.1 at defect locations and similar to 0.3 at pristine regions. Our findings are in good agreement with the theoretically predicted values. These defects provide low-resistance conduction paths in MoS2-based nanodevices and will play a prominent role as the device junction contact area decreases in size.
引用
收藏
页码:19278 / 19286
页数:9
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