Athermal arrayed-waveguide grating multi/demultiplexers composed of TiO2-SiO2 waveguides on Si

被引：25

作者：

Hirota, H ^{[1
]}

Itoh, M ^{[1
]}

Oguma, M ^{[1
]}

Hibino, Y ^{[1
]}

机构：

[1] NTT Corp, Photon Labs, Atsugi, Kanagawa 2430198, Japan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 02期

关键词：

optical planar waveguides; optical waveguides; wavelength-division multiplexing;

D O I：

10.1109/LPT.2004.839449

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have successfully demonstrated a novel athermal arrayed-waveguide grating (AWG), which is composed of highly TiO2-doped SiO2 glass rib waveguides on a silicon substrate. We found that the wavelength temperature coefficients of the athermal AWG depend not only on the TiO2 concentration but also on the annealing temperature after fabrication. We obtained a center wavelength temperature coefficient of 0.7 pm/degreesC at a TiO2 concentration of 66 mol% and an annealing temperature of 900 degreesC.

引用

页码：375 / 377

页数：3

共 9 条

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