An on-pole-piece-tip deflector for high-resolution, low-voltage scanning electron microscopes

被引：0

作者：

Zhao, Y ^{[1
]}

Khursheed, A ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect Engn, Ctr Integrated Circuit Failure Anal & Reliabil, Singapore 119260, Singapore

来源：

SCANNING | 1998年 / 20卷 / 01期

关键词：

immersion objective lenses; in-lens deflectors; moving objective lenses; scanning electron microscopes; toroidal coils;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A proposal to enlarge the field of view of low-voltage, high-resolution scanning electron microscopes is presented in this paper The proposal is based upon mounting primary beam deflectors onto the pole tip of the objective lens. Simulation results show that this compact arrangement of beam deflection should widen the present attainable field of view at probe resolutions < 5 nm by over an order of magnitude.

引用

页码：10 / 16

页数：7

共 10 条

[1] A high-resolution time-dispersive electron spectrometer for fast voltage-contrast measurements [J].