Fabrication of a Hydrogen Sensing Optical Fiber Using Atomic Layer Deposition

被引：5

作者：

Chi, Xingqiang ^{[1
,2
]}

Wang, Xiangjun ^{[1
]}

Ke, Xuan ^{[3
]}

Zhang, Xiaofeng ^{[1
]}

机构：

[1] Naval Univ Engn, Coll Elect Engn, Wuhan 430033, Peoples R China

[2] Wuhan Polytech, Sch Mech & Elect Engn, Wuhan 430074, Peoples R China

[3] Jianghan Univ, Sch Phys & Informat Engn, Wuhan 430056, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2022年 / 34卷 / 13期

基金：

中国国家自然科学基金;

关键词：

Optical fiber sensors; Optical fibers; Optical device fabrication; Hydrogen; Optical scattering; Optical reflection; Strain; Atomic layer deposition; Pd-coated optical fiber; hydrogen sensing;

D O I：

10.1109/LPT.2022.3181676

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated a Pd-coated optical fiber for hydrogen sensing using atomic layer deposition (ALD) for the first time. Pd atoms can be bonded to the silica cladding of an optical fiber much more strongly using ALD than those achieved using an electroplating method or magnetron sputtering deposition. The sensing fiber fabrication process and the experiments to detect hydrogen are reported in detail. ALD is shown to produce high-quality hydrogen sensing fibers.

引用

页码：687 / 690

页数：4

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