AN ENHANCED-DIFFERENTIAL PMUT FOR ULTRA-LONG DISTANCE MEASUREMENT IN AIR

被引：10

作者：

Cai, Guixiang ^{[1
,2
]}

Zhou, Xuemei ^{[1
,2
]}

Yi, Yongjie ^{[3
]}

Zhou, Hong ^{[1
,2
]}

Li, Dongxiao ^{[1
,2
]}

Zhang, Jiajia ^{[4
]}

Huang, He ^{[5
]}

Mu, Xiaojing ^{[1
,2
]}

机构：

[1] Chongqing Univ, Minist Educ, Key Lab Optoelect Technol & Syst, Chongqing 400044, Peoples R China

[2] Chongqing Univ, Int R&D Ctr Micronano Syst & New Mat Technol, Chongqing 400044, Peoples R China

[3] Chongqing United Microelect Ctr, Chongqing 401332, Peoples R China

[4] Chongqing Univ Posts & Telecommun, Inst Automat, Chongqing 400065, Peoples R China

[5] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China

来源：

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) | 2021年

关键词：

MEMS; Differential pMUT; Aluminum Nitride; Rangefinder; Ultra-long Distance Measurement;

D O I：

10.1109/MEMS51782.2021.9375146

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes an enhanced-differential piezoelectric micromachined ultrasonic transducer (pMUT) based on Aluminum Nitride (AN), which realizes ultralong and high-accurate distance measuring. Seven pieces of differential pMUT units with the average sensitivity of 2.077 mu m/5V are integrated into one device to transmit or receive ultrasonic signal simultaneously, improving the signal strength significantly. With the resonant frequency of 77.34 kHz, this pMUT has a 4 cm-100 cm working range base on Time-of-Flight (ToF) measurement principle in chip-to-chip experiment. The test results show that maximum measuring error is 4 mm.

引用

页码：899 / 902

页数：4

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