Highly Tunable Narrow Bandpass MEMS Filter

被引：26

作者：

Al Hafiz, Md Abdullah ^{[1
]}

Kosuru, Lakshmoji ^{[1
]}

Hajjaj, Amal Z. ^{[1
]}

Younis, Mohammad I. ^{[1
]}

机构：

[1] King Abdullah Univ Sci & Technol, Phys Sci & Engn Div, Thuwal 239556900, Saudi Arabia

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2017年 / 64卷 / 08期

关键词：

Bandpass filter; electrothermal actuation; frequency tunability; microelectromechanical-system (MEMS) arch resonator; BANDWIDTH;

D O I：

10.1109/TED.2017.2716949

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (similar to 125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 +/- 50 Hz, a stopband rejection of >17 dB, and a passband ripple <= 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

引用

页码：3392 / 3398

页数：7

共 21 条

[1] Electrothermal Frequency Modulated Resonator for Mechanical Memory [J].

Al Hafiz, Md Abdullah ;

Kosuru, Lakshmoji ;

Younis, Mohammad I. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2016, 25 (05) :877-883

[2] Efficient capacitive transduction of high-frequency micromechanical resonators by intrinsic cancellation of parasitic feedthrough capacitances [J].

Arcamone, Julien ;

Colinet, Eric ;

Niel, Antoine ;

Ollier, Eric .

APPLIED PHYSICS LETTERS, 2010, 97 (04)

[3]

Arellano N, 2008, PROC IEEE MICR ELECT, P721

[4] High-Q HF microelectromechanical filters [J].

Bannon, FD ;

Clark, JR ;

Nguyen, CTC .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2000, 35 (04) :512-526

[5] Implementation of a CMOS-MEMS Filter Through a Mixed Electrical and Mechanical Coupling Scheme [J].

Chen, Chao-Yu ;

Li, Ming-Huang ;

Chin, Chi-Hang ;

Li, Sheng-Shian .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2016, 25 (02) :262-274

[6]

Clark JR, 1997, TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P1161, DOI 10.1109/SENSOR.1997.635411

[7]

Demirci MU, 2005, TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P2131

[8]

Fedder G., 2005, IEDM, P5

[9] A micromechanical bandpass filter with adjustable bandwidth and bidirectional control of centre frequency [J].

Hajhashemi, M. S. ;

Amini, Alborz ;

Bahreyni, Behraad .

SENSORS AND ACTUATORS A-PHYSICAL, 2012, 187 :10-15

[10] Highly Tunable Electrothermally and Electrostatically Actuated Resonators [J].

Hajjaj, Amal Z. ;

Alcheikh, Nouha ;

Ramini, Abdallah ;

Al Hafiz, Md Abdullah ;

Younis, Mohammad I. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2016, 25 (03) :440-449

← 1 2 3 →