A Novel Integrated Power Inductor With Vertical Laminated Core for Improved L/R Ratios

被引：8
作者：
Fang, Xiangming [1 ]
Wu, Rongxiang [2 ]
Peng, Lulu [1 ]
Sin, Johnny K. O. [1 ]
机构：
[1] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R China
[2] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610051, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2014年 / 35卷 / 12期
基金：
中国国家自然科学基金;
关键词：
DC-DC power conversion; integrated inductors; monolithic inductors; lamination; magnetic anisotropy; MAGNETIC CORE;
D O I：
10.1109/LED.2014.2362749
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this letter, a novel integrated power inductor with a vertical laminated NiFe magnetic core for improved inductance to resistance ratio (L/R) ratios is proposed and demonstrated. Both the windings and magnetic core are accommodated within a groove at the backside of a silicon substrate and connected to the front-side IC through vias for compactness. NiFe is used to increase the inductance, and vertical lamination is used to suppress the eddy current in the magnetic core and assist hard axis alignment. A 1-mm(2) embedded inductor with 131-nH inductance and 60-m Omega dc resistance working in megahertz range is fabricated. The L/R ratio is increased by seven times compared with integrated inductors with similar area, making it suitable for portable electronics power conversion system-on-chip applications.
引用
收藏
页码：1287 / 1289
页数：3
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