MOEMS optical delay line for optical coherence tomography

被引：0
|
作者：
Choudhary, Om P. [1 ]
Chouksey, S. [1 ]
Sen, P. K. [1 ]
Sen, P. [1 ]
Solanki, J. [1 ]
Andrews, J. T. [1 ]
机构：
[1] Shri GS Inst Technol Sci, Dept Appl Phys, Natl MEMS Design Ctr, Indore 452003, Madhya Pradesh, India
来源：
INTERNATIONAL CONFERENCE ON RECENT TRENDS IN PHYSICS (ICRTP 2014) | 2014年 / 534卷
关键词：
D O I：
10.1088/1742-6596/534/1/012066
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Micro-Opto-Electro-Mechanical optical coherence tomography, a lab-on-chip for biomedical applications is designed, studied, fabricated and characterized. To fabricate the device standard PolyMUMPS processes is adopted. We report the utilization of electro-optic modulator for a fast scanning optical delay line for time domain optical coherence tomography. Design optimization are performed using Tanner EDA while simulations are performed using COMSOL. The paper summarizes various results and fabrication methodology adopted. The success of the device promises a future hand-held or endoscopic optical coherence tomography for biomedical applications.
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页数：4
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