Inverse determination of coupling of modes parameters of surface acoustic wave resonators

被引：22

作者：

Wu, TT ^{[1
]}

Wang, SM

Chen, YY

Wu, TY

Chang, PZ

Huang, LS

Wang, CL

Wu, CW

Lee, CK

机构：

[1] Natl Taiwan Univ, Inst Appl Mech, Taipei 106, Taiwan

[2] TXC Corp, Tao Yuan, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 11A期

关键词：

surface acoustic wave; coupling of modes; IDT; inverse; resonator filter;

D O I：

10.1143/JJAP.41.6610

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Extraction of coupling of modes (COM) parameters from the manufacturing process of a surface acoustic wave device (SAW) is important in practice. In this study, we employed an inverse algorithm to recover the COM parameters from the measured admittance of a one-port SAW resonator. For completeness, the COM equations, the P-matrix representation And them related COM parameters have been summarized. The admittance of a one-port resonator was derived based on the P-matrix representation. One-port and two-port SAW resonator filters were, fabricated and the related responses were measured. The simplex method was then used to determine the COM parameters inversely. The recovered COM parameters of the one-port SAW resonator have been demonstrated to be applicable to simulate not only the frequency response of the one-port SAW. resonator but also that of the two-port

引用

页码：6610 / 6615

页数：6

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