Importance of relativistic effect on inelastic scattering cross-sections for quantitative microanalysis

For quantitative microanalysis of specimens using core-loss spectra, elemental maps by electron energy-loss spectroscopy or energy-filtering transmission electron microscopy, accurate values of partial cross-sections are required. Upon increasing the incident electron energy, the relativistic effect including retardation and magnetic interactions on inelastic scattering cross-sections can not be ignored. In the present work, we report the direct observation of the relativistic effect as it appears in the angular distribution of inner-shell electron excitation by using the energy-filtering diffraction technique performed with a high-voltage electron microscope (JEOL-ARM1000). The experimental result confirms a theoretical prediction proposed previously. The importance of the relativistic correction on partial cross-section is discussed in relation to quantitative microanalysis. (C) 1997 Elsevier Science Ltd. All rights reserved.