Aspects of the performance of a femtosecond laser-pulsed 3-dimensional atom probe

被引:67
作者
Cerezo, A.
Clifton, P. H.
Gomberg, A.
Smith, G. D. W.
机构
[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[2] Imago Sci, Oxford NanoSci Div, Milton Keynes MK11 3ER, Bucks, England
关键词
atom probe; laser pulsing; femtosecond laser;
D O I
10.1016/j.ultramic.2007.02.025
中图分类号
TH742 [显微镜];
学科分类号
摘要
Specimen heating is shown to occur in the laser-pulsed 3-dimensional atom probe (3DAP), even in the case of femtosecond pulse lengths. This can have an impact on the spatial resolution of 3DAP analysis, due to surface diffusion, and peak temperatures must be kept sufficiently low to avoid these effects. Similarly, mass resolution can be limited in the analysis of low thermal conductivity materials, due to the slower cool-down of the specimen after the pulse. In such cases, the use of lower repetition frequencies and specimens with large shank angles is shown to improve mass resolution and reduce the noise and degradation in quantitative accuracy resulting from increases in base temperature. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:720 / 725
页数:6
相关论文
共 13 条
[1]   Measurement of temperature rises in the femtosecond laser pulsed three-dimensional atom probe [J].
Cerezo, A ;
Smith, GDW ;
Clifton, PH .
APPLIED PHYSICS LETTERS, 2006, 88 (15)
[2]   PULSED LASER ATOM PROBE ANALYSIS OF SEMICONDUCTOR-MATERIALS [J].
CEREZO, A ;
GROVENOR, CRM ;
SMITH, GDW .
JOURNAL OF MICROSCOPY-OXFORD, 1986, 141 :155-170
[3]   Stability and thermal reaction of GMR NiFe/Cu thin films [J].
Ene, CB ;
Schmitz, G ;
Kirchheim, R ;
Hütten, A .
ACTA MATERIALIA, 2005, 53 (12) :3383-3393
[4]   Estimation of the tip field enhancement on a field emitter under laser illumination [J].
Gault, B ;
Vurpillot, F ;
Bostel, A ;
Menand, A ;
Deconihout, B .
APPLIED PHYSICS LETTERS, 2005, 86 (09) :1-3
[6]   PULSED-LASER ATOM-PROBE FIELD-ION MICROSCOPY [J].
KELLOGG, GL ;
TSONG, TT .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) :1184-1193
[7]   Information storage materials: nanoscale characterisation by three-dimensional atom probe analysis [J].
Larson, DJ ;
Petford-Long, AK ;
Ma, YQ ;
Cerezo, A .
ACTA MATERIALIA, 2004, 52 (10) :2847-2862
[8]   THERMALLY ENHANCED FIELD-EMISSION FROM A LASER-ILLUMINATED TUNGSTEN TIP - TEMPERATURE RISE OF TIP [J].
LEE, MJG ;
REIFENBERGER, R ;
ROBINS, ES ;
LINDENMAYR, HG .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (09) :4996-5006
[9]   APPLICATION OF POSITION-SENSITIVE ATOM PROBE TO THE STUDY OF THE MICROCHEMISTRY AND MORPHOLOGY OF QUANTUM WELL INTERFACES [J].
LIDDLE, JA ;
NORMAN, AG ;
CEREZO, A ;
GROVENOR, CRM .
APPLIED PHYSICS LETTERS, 1989, 54 (16) :1555-1557
[10]  
Miller M. K., 2000, ATOM PROBE TOMOGRAPH