A modeling approach to include mechanical microsystem components into the system simulation

被引：15

作者：

Neul, R ^{[1
]}

Becker, U ^{[1
]}

Lorenz, G ^{[1
]}

Schwarz, P ^{[1
]}

Haase, J ^{[1
]}

Wunsche, S ^{[1
]}

机构：

[1] Robert Bosch GmbH, Stuttgart, Germany

来源：

DESIGN, AUTOMATION AND TEST IN EUROPE, PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/DATE.1998.655906

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

For MEMS devices modem technologies are used to integrate very complex components and subsystems closely together: Due to mixed-domain problems as well as the occuring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analysed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.

引用

页码：510 / 517

页数：8