High excitation of the species in nitrogen-aluminum plasma generated by electron cyclotron resonance microwave discharge of N2 gas and pulsed laser ablation of Al target

被引:7
作者
Liang, Peipei [1 ]
Li, Yanli [1 ]
Cai, Hua [1 ]
You, Qinghu [1 ]
Yang, Xu [1 ]
Huang, Feiling [1 ]
Sun, Jian [1 ]
Xu, Ning [1 ]
Wu, Jiada [1 ]
机构
[1] Fudan Univ, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China
基金
中国国家自然科学基金; 国家教育部博士点专项基金资助;
关键词
Plasma; Electron cyclotron resonance microwave discharge; Pulsed laser ablation; Optical emission spectroscopy; Spectral simulation; INDUCED BREAKDOWN SPECTROSCOPY; MOLECULAR-EMISSION; GRAPHITE; SPECTRA; LIBS;
D O I
10.1016/j.sab.2014.09.007
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A reactive nitrogen-aluminum plasma generated by electron cyclotron resonance (ECR) microwave discharge of N-2 gas and pulsed laser ablation of an Al target is characterized spectroscopically by time-integrated and time-resolved optical emission spectroscopy CUES). The vibrational and rotational temperatures of N-2 species are determined by spectral simulation. The generated plasma strongly emits radiation from a variety of excited species including ambient nitrogen and ablated aluminum and exhibits unique features in optical emission and temperature evolution compared with the plasmas generated by a pure ECR discharge or by the expansion of the ablation plume. The working N-2 gas is first excited by ECR discharge and the excitation of nitrogen is further enhanced due to the fast expansion of the aluminum plume induced by target ablation, while the excitation of the ablated aluminum is prolonged during the plume expansion in the ECR nitrogen plasma, resulting in the formation of strongly reactive nitrogen-aluminum plasma which contains highly excited species with high vibrational and rotational temperatures. The enhanced intensities and the prolonged duration of the optical emissions of the combined plasma would provide an improved analytical capability for spectrochemical analysis. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:226 / 233
页数:8
相关论文
共 26 条
[1]   X-ray studies and time-resolved photoluminescence on optically pumped antimonide-based midinfrared type-II lasers [J].
Schwender, C ;
Drumm, JO ;
Hoffmann, G ;
Vogelgesang, B ;
Fouckhardt, H .
SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY, 2004, 60 (14) :3387-3392
[2]   ELECTRON-CYCLOTRON RESONANCE MICROWAVE DISCHARGES FOR ETCHING AND THIN-FILM DEPOSITION [J].
ASMUSSEN, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :883-893
[3]  
Bazavan M, 2008, ROM REP PHYS, V60, P671
[4]   Determination of rotational and vibrational temperatures of a nitrogen helicon plasma [J].
Biloiu, Costel ;
Sun, Xuan ;
Harvey, Zane ;
Scime, Earl .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (10)
[5]   Effect of laser parameters on laser ablation and laser-induced plasma formation: A numerical modeling investigation [J].
Bogaerts, A ;
Chen, ZY .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2005, 60 (9-10) :1280-1307
[6]   Analysis of solids by laser ablation and resonance-enhanced laser-induced plasma spectroscopy [J].
Chan, SY ;
Cheung, NH .
ANALYTICAL CHEMISTRY, 2000, 72 (09) :2087-2092
[7]   ANALYTICAL APPLICATION OF THE MICROWAVE INDUCED PLASMA USED WITH LASER ABLATION OF SOLID SAMPLES [J].
CIOCAN, A ;
UEBBING, J ;
NIEMAX, K .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1992, 47 (05) :611-617
[8]   Neutral gas temperature estimates in an inductively coupled CF4 plasma by fitting diatomic emission spectra [J].
Cruden, BA ;
Rao, MVVS ;
Sharma, SP ;
Meyyappan, M .
JOURNAL OF APPLIED PHYSICS, 2002, 91 (11) :8955-8964
[9]  
DEBENEDICTIS S, 1994, J PHYS B-AT MOL OPT, V27, P615, DOI 10.1088/0953-4075/27/3/025
[10]   A comparative study of the enhancement of molecular emission in a spatially confined plume through optical emission spectroscopy and probe beam deflection measurements [J].
Ding, Dayu ;
Liang, Peipei ;
Wu, Jiada ;
Xu, Ning ;
Ying, Zhifeng ;
Sun, Jian .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2013, 79-80 :44-50