A Self-Mixing Displacement Sensor With Fringe-Loss Compensation for Harmonic Vibrations

被引:69
作者
Zabit, Usman [1 ]
Bony, Francis [1 ]
Bosch, Thierry [1 ]
Rakic, Aleksandar D. [2 ]
机构
[1] Univ Toulouse, LOSE, INPT, F-31071 Toulouse 7, France
[2] Univ Queensland, Sch Informat Technol & Elect Engn, Brisbane, Qld 4072, Australia
关键词
Displacement measurement; optical feedback; optical interferometry; vibration measurement; LASER-DIODE; FEEDBACK;
D O I
10.1109/LPT.2010.2040825
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The disappearance of self-mixing fringes in the moderate feedback regime decreases the displacement measurement accuracy. The proposed method detects and compensates the fringe-loss, to limit the error to around 40 nm for micrometer range harmonic amplitude displacements. Moreover, it can also treat arbitrary displacements without any time-consuming optimization procedure and is suitable for implementation in a real-time displacement sensor.
引用
收藏
页码:410 / 412
页数:3
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