Investigations on the Gate-Induced Drain Leakage Current of Polycrystalline-Silicon Thin-Film Transistor and Its Suppression With Drain Bias Sweep

被引:6
作者
Zhang, Dongli [1 ]
Wang, Mingxiang [1 ]
Wang, Huaisheng [1 ]
Shan, Qi [1 ]
机构
[1] Soochow Univ, Dept Microelect, Suzhou 215006, Peoples R China
基金
中国国家自然科学基金;
关键词
Activation energy; drain bias sweep; gate-induced drain leakage (GIDL); polycrystalline-silicon (poly-Si); thin-film transistor (TFT); uniformity;
D O I
10.1109/TED.2016.2533162
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, reduction of the gate-induced drain leakage (GIDL) current after drain bias sweeps for p-type polycrystalline-silicon thin-film transistor is reported, which is proposed to be due to local electron generation and trapping near the drain during the drain bias sweep in the kink current region. The reduction of the GIDL current during drain bias sweeps at successively lower gate biases undergoes a two-stage evolution behavior. The mechanism for the two-stage reduction behavior of the leakage current is clarified with the extraction and comparison of the activation energy for the leakage currents before and after the drain bias sweeps. Drain bias sweeps are also found effective in improving the uniformity of the leakage currents.
引用
收藏
页码:1572 / 1577
页数:6
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