The effects and mechanism of chemical additives on the pyrolysis evolution and microstructure of sol-gel derived Ba1-xSrxTiO3 thin films

被引:18
作者
Ding, YP
Jin, CY
Meng, ZY [1 ]
机构
[1] Shanghai Univ Sci & Technol, Dept Mat Sci, Shanghai 201800, Peoples R China
[2] Jiao Tong Univ, Dept Mat Sci, Shanghai 20030, Peoples R China
关键词
BST film; deposition process; crystallization; microstructure;
D O I
10.1016/S0040-6090(00)01227-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The dependence of phase evolution on preparation conditions of precursor sols were investigated by DSC and XRD experiments during the sol-gel processing for Ba1-xSrxTiO3(BST) thin films. Two kinds of crystallization paths of perovskite BST were found during the annealing, which are closely dependent on chelating agent and solution aging. One path was the decomposition of all oxycarbonate intermediate, the other was the solid reaction between Ba/Sr carbonates and titanium oxides. For fresh sol, the addition of acetylacetone (HAcAc) as a chelating agent reduced the crystallization temperature by similar to 70 degreesC. Moreover, the back scattered scanning electron microscopy (BS-SEM) revealed that the HAcAc-derived films were homogeneous in composition in comparison with the heterogeneity of the films prepared with no chelating agent addition. The Variations mentioned above were considered originating from different molecule structures of the precursors. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:196 / 199
页数:4
相关论文
共 12 条
[1]   Tunability and Calculation of the Dielectric Constant of Capacitor Structures with Interdigital Electrodes [J].
D. Dimos ;
M.V. Raymond ;
R.W. Schwartz ;
H.N. Al-Shareef ;
C.H. Mueller .
Journal of Electroceramics, 1997, 1 (2) :145-153
[2]  
CHANDLER CD, 1993, CHEM REV, V93, P1025
[3]  
DING Y, 1998, P 9 INT C MOD MAT TE, P615
[4]  
GRAMMATICO JP, 1997, J MAT SCI LETT ELECT, V3, P82
[5]   In-situ transmission electron microscopy crystallization studies of sol-gel-derived barium titanate thin films [J].
Gust, MC ;
Evans, ND ;
Momoda, LA ;
Mecartney, ML .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1997, 80 (11) :2828-2836
[6]  
HOFFMAN W, 1997, THIN SOLID FILMS, V305, P305
[7]   Studies on structural and electrical properties of barium strontium titanate thin films developed by metallo-organic decomposition [J].
Krupanidhi, SB ;
Peng, CJ .
THIN SOLID FILMS, 1997, 305 (1-2) :144-156
[8]   SOL-GEL PROCESSED BATIO3 - STRUCTURAL EVOLUTION FROM THE GEL TO THE CRYSTALLINE POWDER [J].
MOSSET, A ;
GAUTIERLUNEAU, I ;
GALY, J ;
STREHLOW, P ;
SCHMIDT, H .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 100 (1-3) :339-344
[9]  
SCOTT JF, 1992, P 8 IEEE INT S APPL, P356
[10]   KINETICS OF BATIO3 AND PBTIO3 FORMATION FROM METALLOORGANIC PRECURSORS [J].
SHAIKH, AS ;
VEST, GM .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1986, 69 (09) :682-688