Verification methods for micro gears. Analysis of double flank roll testing applied to micro gears

In recent years there has been a considerable interest in microsystems, named as MEMS (Micro Electromechanical Systems), which are present in daily life by means of different products coming from several sectors as automotion, medical or consumer. Its continuing expansion is expected, derived from the trend towards miniaturization of components and the increasing applications for these micro devices. To overcome this, the technology to produce these products known as microsystem technology (MST), has been improving in order to allow the manufacturing of this type of parts becoming of growing importance over the past years. Micro gears are commonly used in electronics industry where the miniaturization process follows a constant evolution with multiple use advantages despite their small size. In this work the study and analysis of the existing verification techniques for micro gears together with the definition of a double flank rolling test focused on these gears is presented. (C) 2013 The Authors. Published by Elsevier Ltd. Open access under CC BY-NC-ND license.