Enhanced dielectric constant and fatigue-resistance of PbZr0.4Ti0.6O3 capacitor with magnetic intermetallic FePt top electrode

被引：15

作者：

Liu, B. T. ^{[1
]}

Zhao, J. W. ^{[1
]}

Li, X. H. ^{[1
]}

Zhou, Y. ^{[1
]}

Bian, F. ^{[1
]}

Wang, X. Y. ^{[1
]}

Zhao, Q. X. ^{[1
]}

Wang, Y. L. ^{[1
]}

Guo, Q. L. ^{[1
]}

Wang, L. X. ^{[2
]}

Zhang, X. Y. ^{[3
]}

机构：

[1] Hebei Univ, Coll Phys Sci & Technol, Baoding 071002, Hebei, Peoples R China

[2] Hebei Univ, Coll Elect & Informat Engn, Baoding 071002, Hebei, Peoples R China

[3] Yanshan Univ, State Key Lab Metastable Mat Sci & Technol, Qinhuangdao 066004, Hebei, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 25期

关键词：

dielectric polarisation; electrodes; fatigue; ferroelectric capacitors; ferroelectric thin films; interface phenomena; iron alloys; lead compounds; permittivity; platinum; platinum alloys; zirconium compounds; THIN-FILMS; SRTIO3;

D O I：

10.1063/1.3457382

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Both FePt/PbZr0.4Ti0.6O3(PZT)/Pt and Pt/PZT/Pt ferroelectric capacitors have been fabricated on Si substrates. It is found that up to 10(9) switching cycles, the FePt/PZT/Pt capacitor, measured at 50 kHz, with polarization decreased by 57%, is superior to the Pt/PZT/Pt capacitor by 82%, indicating that an intermetallic FePt top electrode can also improve the fatigue-resistance of a PZT capacitor. Maximum dielectric constants are 980 and 770 for PZT capacitors with FePt and Pt, respectively. This is attributed to the interface effect between PZT film and the top electrode since the interfacial capacitance of FePt/PZT is 3.5 times as large as that of Pt/PZT interface. (C) 2010 American Institute of Physics. [doi:10.1063/1.3457382]

引用

页数：3

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