Synthesis and functional properties of vanadium oxides:: V2O3, VO2, and V2O5 deposited on glass by aerosol-assisted CVD

被引：144

作者：

Piccirillo, Clara ^{[1
]}

Binions, Russell ^{[1
]}

Parkin, Ivan P. ^{[1
]}

机构：

[1] UCL, Dept Chem, Christopher Ingold Labs, London WC1H 0AJ, England

来源：

CHEMICAL VAPOR DEPOSITION | 2007年 / 13卷 / 04期

关键词：

AACVD; phase transition; thin films; vanadium oxides;

D O I：

10.1002/cvde.200606540

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Thin films of vanadium oxides were deposited on glass by aerosol-assisted (AA) CVD from vanadium(III) acetylacetonate and vanadyl(TV) acetylacetonate. The vanadium precursor, solvent, and carrier gas flow rate determined the phase of vanadium oxide formed (V2O3, VO2, or V2O5). Films were characterized using various analytical techniques. VO2 films were analyzed at various temperatures to study their thermochromic behavior. The V2O3 reflectance-transmission plots showed a cross-over (ideal behavior for a solar-control mirror).

引用

页码：145 / 151

页数：7

共 24 条

[1] Aerosol-assisted chemical vapour deposition of sodium fluoride thin films [J].

Binions, R ;

Carmalt, CJ ;

Parkin, IP .

THIN SOLID FILMS, 2004, 469 :416-419

[2] Gallium oxide thin films from the atmospheric pressure chemical vapor deposition reaction of gallium trichloride and methanol [J].

Binions, R ;

Carmalt, CJ ;

Parkin, IP ;

Pratt, KFE ;

Shaw, GA .

CHEMISTRY OF MATERIALS, 2004, 16 (12) :2489-2493

[3] Chemical vapour deposition of coatings [J].

Choy, KL .

PROGRESS IN MATERIALS SCIENCE, 2003, 48 (02) :57-170

[4] Aerosol assisted chemical vapour deposition of tungsten oxide films from polyoxotungstate precursors: active photocatalysts [J].

Cross, WB ;

Parkin, IP .

CHEMICAL COMMUNICATIONS, 2003, (14) :1696-1697

[5] A novel wet process for the preparation of vanadium dioxide thin film [J].

Deki, S ;

Aoi, Y ;

Kajinami, A .

JOURNAL OF MATERIALS SCIENCE, 1997, 32 (16) :4269-4273

[6]

ENJALBERT R, 1986, ACTA CRYSTALLOGR C, V42, P1497

[7] Atmospheric pressure chemical vapour deposition of vanadium(v) oxide films on glass substrates from reactions of VOCl3 and VCl4 with water [J].

Field, MN ;

Parkin, IP .

JOURNAL OF MATERIALS CHEMISTRY, 2000, 10 (08) :1863-1866

[8] Electrochromism of annealed vacuum-evaporated V2O5 films [J].

Guan, ZS ;

Yao, JN ;

Yang, YA ;

Loo, BH .

JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1998, 443 (02) :175-179

[9] Mott-Hubbard metal-insulator transition in paramagnetic V2O3:: An LDA+DMFT(QMC) study [J].

Held, K ;

Keller, G ;

Eyert, V ;

Vollhardt, D ;

Anisimov, VI .

PHYSICAL REVIEW LETTERS, 2001, 86 (23) :5345-5348

[10] XPS study of the Li intercalation process in sol-gel-produced V2O5 thin film:: influence of substrate and film synthesis modification [J].

Ibris, N ;

Salvi, AM ;

Liberatore, M ;

Decker, F ;

Surca, A .

SURFACE AND INTERFACE ANALYSIS, 2005, 37 (12) :1092-1104

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