Self-Catalyzed Growth of Vertical GaSb Nanowires on InAs Stems by Metal-Organic Chemical Vapor Deposition

被引:9
作者
Ji, Xianghai [1 ,2 ]
Yang, Xiaoguang [1 ,2 ]
Yang, Tao [1 ,2 ]
机构
[1] Chinese Acad Sci, Inst Semicond, Beijing Key Lab Low Dimens Semicond Mat & Devices, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
来源
NANOSCALE RESEARCH LETTERS | 2017年 / 12卷
基金
中国国家自然科学基金;
关键词
Heterostructure nanowire; InAs/GaSb; Self catalyzed; Crystal structure; Metal organic chemical vapor deposition; MOLECULAR-BEAM EPITAXY; CORE-SHELL NANOWIRES; HETEROSTRUCTURE NANOWIRES; SI; SILICON; TRANSISTORS; TEMPERATURE; TRANSPORT; DENSITY;
D O I
10.1186/s11671-017-2207-5
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report the first self-catalyzed growth of high-quality GaSb nanowires on InAs stems using metal-organic chemical vapor deposition (MOCVD) on Si (111) substrates. To achieve the growth of vertical InAs/GaSb heterostructure nanowires, the two-step flow rates of the trimethylgallium (TMGa) and trimethylantimony (TMSb) are used. We first use relatively low TMGa and TMSb flow rates to preserve the Ga droplets on the thin InAs stems. Then, the flow rates of TMGa and TMSb are increased to enhance the axial growth rate. Because of the slower radial growth rate of GaSb at higher growth temperature, GaSb nanowires grown at 500 degrees C exhibit larger diameters than those grown at 520 degrees C. However, with respect to the axial growth, due to the Gibbs-Thomson effect and the reduction in the droplet supersaturation with increasing growth temperature, GaSb nanowires grown at 500 degrees C are longer than those grown at 520 degrees C. Detailed transmission electron microscopy (TEM) analyses reveal that the GaSb nanowires have a perfect zinc-blende (ZB) crystal structure. The growth method presented here may be suitable for other antimonide nanowire growth, and the axial InAs/GaSb heterostructure nanowires may have strong potential for use in the fabrication of novel nanowire-based devices and in the study of fundamental quantum physics.
引用
收藏
页数:8
相关论文
共 50 条
  • [31] Metal-organic Chemical Vapor Deposition of GaSb/GaAs Quantum Dots: the Dependence of the Morphology on Growth Temperature and Vapour V/III Ratio
    Yang Haoyu
    Liu Renjun
    Lu You
    Wang Liankai
    Li Tiantian
    Li Guoxing
    Zhang Yuantao
    Zhang Baolin
    CHEMICAL RESEARCH IN CHINESE UNIVERSITIES, 2014, 30 (01) : 13 - 17
  • [32] Numerical simulation and study of the metal-organic chemical vapor deposition growth of ZnO film
    Li, Jian
    Cai, Jiandong
    Wu, Ziling
    Wang, Jie
    Pei, Yanli
    Wang, Gang
    PHYSICS OF FLUIDS, 2019, 31 (02)
  • [33] Effect of doped substrates on the growth of GaAs nanowires via metal organic chemical vapor deposition
    Liu, Yan
    Peng, Yan
    Guo, Jingwei
    La, Dongsheng
    Xu, Zhaopeng
    Wang, Haiyan
    AIP ADVANCES, 2017, 7 (08)
  • [34] Metal-Organic Chemical Vapor Deposition of Aluminum Scandium Nitride
    Leone, Stefano
    Ligl, Jana
    Manz, Christian
    Kirste, Lutz
    Fuchs, Theodor
    Menner, Hanspeter
    Prescher, Mario
    Wiegert, Joachim
    Zukauskaite, Agne
    Quay, Ruediger
    Ambacher, Oliver
    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2020, 14 (01):
  • [35] The self-seeded growth of InAsSb nanowires on silicon by metal-organic vapor phase epitaxy
    Du, Wen-Na
    Yang, Xiao-Guang
    Wang, Xiao-Ye
    Pan, Hua-Yong
    Ji, Hai-Ming
    Luo, Shuai
    Yang, Tao
    Wang, Zhan-Guo
    JOURNAL OF CRYSTAL GROWTH, 2014, 396 : 33 - 37
  • [36] Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal-Organic Chemical Vapor Deposition
    Wu, C. C.
    Wuu, D. S.
    Lin, P. R.
    Chen, T. N.
    Horng, R. H.
    NANOSCALE RESEARCH LETTERS, 2009, 4 (04): : 377 - 384
  • [37] Chemically Tailored Growth of 2D Semiconductors via Hybrid Metal-Organic Chemical Vapor Deposition
    Zhang, Zhepeng
    Hoang, Lauren
    Hocking, Marisa
    Peng, Zhenghan
    Hu, Jenny
    Zaborski Jr, Gregory
    Reddy, Pooja D.
    Dollard, Johnny
    Goldhaber-Gordon, David
    Heinz, Tony F.
    Pop, Eric
    Mannix, Andrew J.
    ACS NANO, 2024, 18 (37) : 25414 - 25424
  • [38] Influence of Sn precursors on Ge1-xSnx growth using metal-organic chemical vapor deposition
    Miki, Yusuke
    Takeuchi, Wakana
    Nakatsuka, Osamu
    Zaima, Shigeaki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (SA)
  • [39] InSb1 - xNx alloys on GaSb substrate by metal-organic chemical vapor deposition for long wavelength detection
    Jin, Y. J.
    Tang, X. H.
    Ke, C.
    Zhang, D. H.
    THIN SOLID FILMS, 2016, 616 : 624 - 627
  • [40] Morphology and growth mechanism of gallium nitride nanotowers synthesized by metal-organic chemical vapor deposition
    Cui, Jishi
    Xiao, Hongdi
    Liu, Jianqiang
    Luan, Caina
    Ji, Ziwu
    Pei, Haiyan
    JOURNAL OF ALLOYS AND COMPOUNDS, 2013, 563 : 72 - 76