248nm laser interaction studies on LaF3/MgF2 optical coatings by cross-sectional transmission electron microscopy

被引：14
作者：
Czigany, Z
Adamik, M
Kaiser, N
机构：
[1] Hungarian Acad Sci, Tech Phys Res Inst, H-1325 Budapest, Hungary
[2] Fraunhofer Inst Angew Opt & Feinmech, D-07745 Jena, Germany
来源：
THIN SOLID FILMS | 1998年 / 312卷 / 1-2期
关键词：
laser irradiation; multilayers; optical coatings; structural properties;
D O I：
10.1016/S0040-6090(97)00729-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
LaF3/MgF2 high-reflectance optical multilayer coatings were investigated by cross-sectional transmission electron microscopy (XTEM) concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show: enhanced texture compared to the as deposited films, indicating , that grain growth took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave layers in the multilayer system increases with increasing distance from the substrate. This effect may result ill increased scatter losses. especially in the ultraviolet spectral region. (C) 1998 Elsevier Science S.A.
引用
收藏
页码：176 / 181
页数：6
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