MEMS-based diffractive optical beam steering technology

被引：5

作者：

Winick, D ^{[1
]}

Duewer, B ^{[1
]}

Chaudhury, S ^{[1
]}

Wilson, J ^{[1
]}

Tucker, J ^{[1
]}

Eksi, U ^{[1
]}

Franzon, P ^{[1
]}

机构：

[1] N Carolina State Univ, Dept Elect & Comp Engn, Ctr Adv Comp & Commun, Raleigh, NC 27695 USA

来源：

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS III | 1998年 / 3276卷

关键词：

optical beam steering; programmable diffractive optics; MEMS; micro-mirrors; phase modulators;

D O I：

10.1117/12.302411

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents some results from phase-1 research into developing a beam steerer based on micro-mechanical diffractive elements. The position of these elements is electrostatically controlled, to allow dynamic programming of a 2-dimensional phase function. Feasibility prototypes were constructed in the MUMPs polysilicon surface micromachine process.

引用

页码：81 / 87

页数：7