[1] Fraunhofer Inst Ceram Technol & Syst IKTS, Dept Smart Mat & Syst, Dresden, Germany
[2] Univ Oulu, Microelect Res Unit, Oulu, Finland
[3] Imperial Coll London, Dept Mat, London, England
[4] Tech Univ Darmstadt, Inst Mat Sci, Darmstadt, Germany
[5] Univ Duisburg Essen, Inst Mat Sci, Essen, Germany
[6] Univ Duisburg Essen, Ctr Nanointegrat Duisburg Essen CENIDE, Essen, Germany