Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO2 layer

被引：13
作者：
Byeon, Kyeong-Jae [1 ]
Yang, Ki-Yeon [1 ]
Lee, Heon [1 ]
机构：
[1] Korea Univ, Dept Mat Sci & Engn, Seoul 136701, South Korea
来源：
MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期
关键词：
nanoimprint lithography; nickel template; silane based SAM; anti-sticking coating;
D O I：
10.1016/j.mee.2007.01.102
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Nickel template is very suitable for thermal imprinting process since it has high mechanical durability and can easily be duplicated using electroforming technique. However nickel has a poor anti-sticking property; in addition, proper and stable releasing layer on nickel surface is not yet available. In this study, thin layer of SiO2 film was deposited on nickel surface and silane based hydrophobic self-assembled monolayer (SAM) was formed on SiO2 film, coated on nickel. Since the silane based SAM layer can be stably formed on SiO2 layer coated nickel template, it can be used anti-sticking layer for thermal imprint process using thermoplastic polymer resin or thermally curable prepolymer resin. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1003 / 1006
页数：4
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