Digital holography used for shape measurement of microscopic object

被引：2
|
作者：
Liu, Jingbo [1 ]
Song, Xiufa [1 ]
Min Huang [1 ]
Wang, Huaying [1 ]
机构：
[1] Hebei Univ Engn, Handan 056038, Peoples R China
来源：
2009 INTERNATIONAL CONFERENCE ON MEASURING TECHNOLOGY AND MECHATRONICS AUTOMATION, VOL II | 2009年
关键词：
RECONSTRUCTION;
D O I：
10.1109/ICMTMA.2009.665
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Digital holography is an emergent imaging technique which provides complete three-dimensional information of an object. An off-axis Fresnel digital holographic system with pre-magnification is built. The recording and numerical reconstruction of digital hologram is analyzed. Experimental investigations have been performed for a USAF test target. The focal plane is determined automatically by Fourier spectrum algorithm. The accurate phase image is obtained based on the automatic phase aberration compensation procedure. The lateral resolution with better than 1 mu m and the axial resolution of no larger than 10nm have been achieved experimentally. The results show that digital holography is very suited for imaging and measurement of microscopic object.
引用
收藏
页码：58 / 61
页数：4
相关论文
共 50 条
  • [31] Shape measurement of a droplet using phase-shifting burst digital holography
    Ujiie, Takumi
    Hayasaki, Yoshio
    BIOMEDICAL IMAGING AND SENSING CONFERENCE 2020, 2020, 11521
  • [32] Measurement of surface shape and deformation by phase-shifting image digital holography
    Yamaguchi, I
    Kato, JI
    Matsuzaki, H
    INTERFEROMETRY XI: APPLICATIONS, 2002, 4778 : 251 - 256
  • [33] Shape measurement of a droplet using phase-shifting burst digital holography
    Ujiie, Takumi
    Ozawa, Yuta
    Hayasaki, Yoshio
    BIOMEDICAL IMAGING AND SENSING CONFERENCE 2021, 2021, 11925
  • [34] Precise measurement of grinded aspherical and freeform optical surface shape by digital holography
    Ledl, Vit
    Psota, Pavel
    Vojtisek, Petr
    Dolecek, Roman
    Dlask, Martin
    OPTICAL MEASUREMENT TECHNIQUES FOR STRUCTURES & SYSTEMS III, 2016, : 181 - 192
  • [35] Measurement of surface shape and deformation by phase-shifting image digital holography
    Yamaguchi, I
    Kato, J
    Matsuzaki, H
    OPTICAL ENGINEERING, 2003, 42 (05) : 1267 - 1271
  • [36] Surpassing digital holography limits by lensless object scanning holography
    Mico, Vicente
    Ferreira, Carlos
    Garcia, Javier
    OPTICS EXPRESS, 2012, 20 (09): : 9382 - 9395
  • [37] Particle measurement with digital holography
    Adams, M
    Kreis, T
    Jüptner, W
    LASER METROLOGY AND INSPECTION, 1999, 3823 : 38 - 43
  • [38] Digital microscopic holography for micrometer particles in air
    Abrantes, Juliana K.
    Stanislas, Michel
    Coudert, Sebastien
    Azevedo, Luis Fernando A.
    APPLIED OPTICS, 2013, 52 (01) : A397 - A409
  • [39] Characterization of MEMS structures by microscopic digital holography
    Coppola, G
    De Nicola, S
    Ferraro, P
    Finizio, A
    Grilli, S
    Iodice, M
    Magro, C
    Pierattini, G
    MEMS/MOEMS: ADVANCES IN PHOTONIC COMMUNICATIONS, SENSING, METROLOGY, PACKAGING AND ASSEMBLY, 2003, 4945 : 71 - 78
  • [40] Simultaneous measurement of shape and deformation using digital light-in-flight recording by holography
    Nilsson, B
    Carlsson, TE
    OPTICAL ENGINEERING, 2000, 39 (01) : 244 - 253
12345