共 15 条
[1]
FEIGEL A, UNPUB
[7]
Novel effects in inorganic As50Se50 photoresists and their application in micro-optics
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1997, 15 (04)
:823-827
[9]
NODA S, 1999, APPL PHYS LETT, V75, P7
[10]
Ozbay E, 1996, NATO ADV SCI INST SE, V315, P41