Internal resonance in coupled oscillators - Part I: A double amplification mass sensing scheme without Duffing nonlinearity

被引:35
作者
Xia, Cao [1 ]
Wang, Dong F. [1 ,2 ]
Ono, Takahito [3 ]
Itoh, Toshihiro [2 ,4 ]
Esashi, Masayoshi [5 ]
机构
[1] Jilin Univ, Sch Mech & Aerosp Engn SMAE, Micro Engn & Micro Syst Lab JML, Changchun 130025, Peoples R China
[2] Natl Inst Adv Ind Sci & Technol, Res Ctr Ubiquitous MEMS & Micro Engn, Tsukuba, Ibaraki 3058564, Japan
[3] Tohoku Univ, Dept Mech Syst & Design, Sendai, Miyagi 9808579, Japan
[4] Univ Tokyo, Dept Precis Engn, Tokyo 1138656, Japan
[5] Tohoku Univ, WPI Adv Inst Mat Res, Sendai, Miyagi 9808577, Japan
基金
中国国家自然科学基金;
关键词
Differential internal resonance; Double sensitivity amplification; Ultimate sensing; Frequency multiplication; Magnetic coupled orthogonal beams; ATTONEWTON FORCE DETECTION; DUCTILE CANTILEVERS; SENSITIVITY; NANOMECHANICS; RESONATORS; PICOGRAM; SENSOR;
D O I
10.1016/j.ymssp.2021.107886
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper, the first of two companion papers, mainly reports a double amplification scheme for mass sensitivity, via a differential phenomenon in various non-Duffing internal resonance systems with even power nonlinearities and coupling. Both frequency sum and amplitude difference of the two symmetrical peaks, in response amplitude of the basic mode, are capable of differentially amplifying the sensitivity as well as greatly suppressing the effect of noise caused by driving amplitude fluctuation. Combining frequency up conversion to further amplify the sensitivity, double amplified mass sensitivity is thus achieved via frequency shift. Magnetically coupled orthogonal beams with a frequency ratio of two to one, is adopted as an example for both theoretical and experimental demonstration. Experimental results show effect of driving voltage fluctuating in the range of 200 mV to 600 mV is reduced by 360%, as well as the sensitivity for mass perturbation in the range of 0 g to 10 g is 332% amplified. Lower driving threshold and wider sensing range are further obtained through adjusting modal damping. Compared to those based on synchronization or internal resonance under the same frequency ratios, the proposed amplification scheme, not only enhances the mass sensitivity up to about 166%, but also suppresses the effect of driving amplitude fluctuation down to about 27.8%, indicating a potential possibility to break through the sensing limit. ? 2021 Elsevier Ltd. All rights reserved.
引用
收藏
页数:12
相关论文
共 58 条
[1]   Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection [J].
Abadal, G ;
Davis, ZJ ;
Helbo, B ;
Borrisé, X ;
Ruiz, R ;
Boisen, A ;
Campabadal, F ;
Esteve, J ;
Figueras, E ;
Pérez-Murano, F ;
Barniol, N .
NANOTECHNOLOGY, 2001, 12 (02) :100-104
[2]   FREQUENCY-MODULATION DETECTION USING HIGH-Q CANTILEVERS FOR ENHANCED FORCE MICROSCOPE SENSITIVITY [J].
ALBRECHT, TR ;
GRUTTER, P ;
HORNE, D ;
RUGAR, D .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) :668-673
[3]   Frequency stabilization in nonlinear micromechanical oscillators [J].
Antonio, Dario ;
Zanette, Damian H. ;
Lopez, Daniel .
NATURE COMMUNICATIONS, 2012, 3
[4]   Love waves dispersion by phononic pillars for nano-particle mass sensing [J].
Bonhomme, J. ;
Oudich, M. ;
Djafari-Rouhani, B. ;
Sarry, F. ;
Pennec, Y. ;
Bonello, B. ;
Beyssen, D. ;
Charette, P. G. .
APPLIED PHYSICS LETTERS, 2019, 114 (01)
[5]  
Chaste J, 2012, NAT NANOTECHNOL, V7, P300, DOI [10.1038/nnano.2012.42, 10.1038/NNANO.2012.42]
[6]   Internal resonance in forced vibration of coupled cantilevers subjected to magnetic interaction [J].
Chen, Li-Qun ;
Zhang, Guo-Ce ;
Ding, Hu .
JOURNAL OF SOUND AND VIBRATION, 2015, 354 :196-218
[7]   Noise processes in nanomechanical resonators [J].
Cleland, AN ;
Roukes, ML .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (05) :2758-2769
[8]   Neutral mass spectrometry of virus capsids above 100 megadaltons with nanomechanical resonators [J].
Dominguez-Medina, Sergio ;
Fostner, Shawn ;
Defoort, Martial ;
Sansa, Marc ;
Stark, Ann-Kathrin ;
Halim, Mohammad Abdul ;
Vernhes, Emeline ;
Gely, Marc ;
Jourdan, Guillaume ;
Alava, Thomas ;
Boulanger, Pascale ;
Masselon, Christophe ;
Hentz, Sebastien .
SCIENCE, 2018, 362 (6417) :918-+
[9]   Internal Resonance Phenomena in Coupled Ductile Cantilevers With Triple Frequency Ratio-Part I: Experimental Observations [J].
Du, Xu ;
Wang, Dong F. ;
Xia, Cao ;
Isao, Shimoyama ;
Maeda, Ryutaro .
IEEE SENSORS JOURNAL, 2019, 19 (14) :5475-5483
[10]   Internal Resonance Phenomena in Coupled Ductile Cantilevers With Triple Frequency Ratio-Part II: A Mass Sensitivity Amplification Schemes [J].
Du, Xu ;
Wang, Dong F. ;
Xia, Cao ;
Shimoyama, Isao ;
Maeda, Ryutaro .
IEEE SENSORS JOURNAL, 2019, 19 (14) :5484-5492