Temperature-Dependent Properties of Spray-Deposited ITO Thin Films

被引：7
作者：
Moholkar, A. V. [1 ,2 ]
Pawar, S. M. [2 ]
Rajpure, K. Y. [3 ]
Patil, P. S. [3 ]
Bhosale, C. H. [3 ]
Kim, J. H. [2 ]
机构：
[1] Gopal Krishna Gokhale Coll, Dept Phys, Kolhapur 416012, Maharashtra, India
[2] Chonnam Natl Univ, Dept Mat Sci & Engn, Kwangju 500757, South Korea
[3] Shivaji Univ, Electrochem Mat Lab, Dept Phys, Kolhapur 416004, Maharashtra, India
来源：
JOURNAL OF THERMAL SPRAY TECHNOLOGY | 2010年 / 19卷 / 03期
关键词：
atomic force microscopy; oxides; semiconducting materials; x-ray diffraction; INDIUM-TIN-OXIDE; DOPED IN2O3 FILMS; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; OPTOELECTRONIC PROPERTIES; SUBSTRATE-TEMPERATURE; GROWTH; PYROLYSIS; MICROSTRUCTURE; MECHANISM;
D O I：
10.1007/s11666-009-9412-4
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Sprayed indium tin oxide (ITO) thin films are synthesized by mixing adequate quantities of ethanolic solutions of indium trichloride and stannic chloride at different substrate temperatures. The pyrolytic decomposition temperature affects the properties and morphology of ITO samples. X-ray diffraction results showed that the films are polycrystalline with cubic structure and exhibit preferential orientation along (222) plane. The SEM and AFM studies indicated that the surface morphology of the samples increases with substrate temperature. The typical I-500 sample is composed of cubic grains and has carrier concentration of 3.26 x 10(20) cm(-3) and mobility of 9.77 cm(2)/V s. The electrical resistivity of ITO films decreased with increasing deposition temperature. The highest figure of merit of film is 4.4 x 10(-3) Omega(-1). Optical absorption studies reveal that films are highly transparent in the visible region and band gap increases with substrate temperature owing to Moss-Burstein effect.
引用
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页码：531 / 540
页数：10
相关论文
共 46 条
[1]   Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process [J].
Alam, MJ ;
Cameron, DC .
THIN SOLID FILMS, 2000, 377 :455-459
[2]   Structural, optical and electrical properties of indium tin oxide thin films prepared by spray pyrolysis [J].
Benamar, E ;
Rami, M ;
Messaoudi, C ;
Sayah, D ;
Ennaoui, A .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1999, 56 (02) :125-139
[3]   Comparison of spray pyrolyzed FTO, ATO and ITO coatings for flat and bent glass substrates [J].
Bisht, H ;
Eun, HT ;
Mehrtens, A ;
Aegerter, MA .
THIN SOLID FILMS, 1999, 351 (1-2) :109-114
[4]   ANOMALOUS OPTICAL ABSORPTION LIMIT IN INSB [J].
BURSTEIN, E .
PHYSICAL REVIEW, 1954, 93 (03) :632-633
[5]   Microstructure of indium oxide films in oxygen ion-assisted deposition [J].
Cho, JS ;
Yoon, KH ;
Koh, SK .
THIN SOLID FILMS, 2000, 368 (01) :111-115
[6]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[7]  
DAWAR AL, 1984, J MATER SCI, V19, P1, DOI 10.1007/BF02403106
[8]  
Debye P, 1916, PHYS Z, V17, P277
[9]   Effect of substrate temperature on electrical, structural, optical and cathodoluminescent properties of In2O3-Sn thin films prepared by spray pyrolysis [J].
El Hichou, A ;
Kachouane, A ;
Bubendorff, JL ;
Addou, M ;
Ebothe, J ;
Troyon, M ;
Bougrine, A .
THIN SOLID FILMS, 2004, 458 (1-2) :263-268
[10]   TRANSPARENT HEAT-REFLECTING COATINGS BASED ON HIGHLY DOPED SEMICONDUCTORS [J].
FRANK, G ;
KAUER, E ;
KOSTLIN, H .
THIN SOLID FILMS, 1981, 77 (1-3) :107-117
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