Electrostatic pick-and-place micro/nanomanipulation under the electron beam

被引:31
作者
Denisyuk, Andrey I. [1 ]
Komissarenko, Filipp E. [1 ]
Mukhin, Ivan S. [1 ,2 ]
机构
[1] St Petersburg Natl Res Univ Informat Technol Mech, St Petersburg 197101, Russia
[2] St Petersburg Acad Univ, RAS, Nanotechnol Res & Educ Ctr, St Petersburg 195220, Russia
基金
俄罗斯基础研究基金会;
关键词
Particle manipulation; Electrostatic manipulation; Pick-and-place; Dielectrophoresis; Scanning electron microscopy; MANIPULATION; FORCES;
D O I
10.1016/j.mee.2014.02.019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Here we present a method of particle pick-and-place manipulation, which is based on electrostatic interaction between objects charged under the beam of a scanning electron microscope. This method allows well-controlled pickup, transport and placement of micro- and nanoparticles as well as visualization of the process and the result of manipulation in real time on electron images. Manipulation of Al2O3, WO3 and tungsten particles under the influence of the electric field proposed by a charged metalized tip was experimentally demonstrated. We also created a theoretical model, which is based on the assumption that the dielectrophoretic force created by the charged metallic tip pulls a particle whereas the van der Waals force retains it on a substrate. (C) 2014 Elsevier 13.V. All rights reserved.
引用
收藏
页码:15 / 18
页数:4
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