Surface structure and optical properties of proton-exchanged Ti-diffused LiNbO3 waveguides

被引：0
|
作者：
Kalabin, IE [1 ]
Grigorieva, TI [1 ]
Pokrovsk, LD [1 ]
Sheglov, DV [1 ]
Shevtsov, DI [1 ]
Atuchin, VV [1 ]
机构：
[1] Russian Acad Sci, Inst Semicond Phys, SB, Lab Opt Mat & Struct, Novosibirsk 630090, Russia
来源：
INTEGRATED OPTICAL DEVICES: FABRICATION AND TESTING | 2002年 / 4944卷
关键词：
lithium niobate; atomic force microscopy; optical waveguide; surface morphology; proton exchange;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The topmost surface of crystal after all stages of proton-exchanged Ti-indiffused LiNbO3 waveguide preparation was studied using atomic force microscopy and high energy electron diffraction. The formation of the flat terraces with minimal height step similar to0.24 nm as a result of high temperature annealing has been detected. The global changing. of crystal surface morphology induced by Ti diffusing was observed. Ion exchange has no influence upon surface microrelief. No new phase formation on the surface was detected. The stability of refractive index was investigated.
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页码：146 / 149
页数：4
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