A novel coilless scanning mirror using eddy current Lorentz force and magnetostatic force

被引：19
作者：
Yang, Hsueh-An
Tang, Tsung-Lin
Lee, Sheng Ta
Fang, Weileun
机构：
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 30043, Taiwan
[2] Natl Tsing Hua Univ, Inst Microelectromech Syst, Hsinchu 30043, Taiwan
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2007年 / 16卷 / 03期
关键词：
Eddy current; Lorentz force; magnetostatic force; scanning mirror;
D O I：
10.1109/JMEMS.2007.896708
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on novel coilless microscanning mirrors driven by the magnetostatic force that resulted from a magnetic interaction as well as the Lorentz force that is induced by an eddy current. This eliminates complicated coil routing and insulation layer deposition and simplifies fabrication allowing easy integration with micromachining and complementary metaloxide-semiconductor processes. Bulk micromachined one-axis and two-axis scanning mirrors are demonstrated, displaying 1-D and 2-D scanning patterns. Two-dimensional scanning patterns are easily tuned by varying the combination of driving frequencies. The results show that the diamagnetic (Cu) mirror is mainly driven by the eddy-current-induced Lorentz force, whereas the ferromagnetic (Ni) mirror is mainly driven by the magnetostatic force.
引用
收藏
页码：511 / 520
页数：10
相关论文
共 26 条
  • [1] Silicon scanning mirror of two DOF with compensation current routing
    Ahn, SH
    Kim, YK
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (11) : 1455 - 1461
  • [2] Stress-induced curvature engineering in surface-micromachined devices
    Aksyuk, VA
    Pardo, F
    Bishop, DJ
    [J]. DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 984 - 993
  • [3] SILICON MICROMACHINED 2-DIMENSIONAL GALVANO OPTICAL SCANNER
    ASADA, N
    MATSUKI, H
    MINAMI, K
    ESASHI, M
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) : 4647 - 4649
  • [4] Benson H, 1996, U PHYS
  • [5] Electromagnetically actuated mirror arrays for use in 3-D optical switching applications
    Bernstein, JJ
    Taylor, WP
    Brazzle, JD
    Corcoran, CJ
    Kirkos, G
    Odhner, JE
    Pareek, A
    Waelti, M
    Zai, M
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (03) : 526 - 535
  • [6] Conant R. A., 2000, Technical Digest. Solid-State Sensor and Actuator Workshop (TRF Cat. No.00TRF-0001), P6
  • [7] Cullity B. D., 1972, INTRO MAGNETIC MAT
  • [8] Crystalline silicon tilting mirrors for optical cross-connect switches
    Greywall, DS
    Busch, PA
    Pardo, F
    Carr, DW
    Bogart, G
    Soh, HT
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2003, 12 (05) : 708 - 712
  • [9] Progress in magnetic microactuators
    Guckel, H
    [J]. MICROSYSTEM TECHNOLOGIES, 1998, 5 (02) : 59 - 61
  • [10] GUY AG, 1972, INTRO MAT SCI
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