Application of supercritical fluids for fabrication of free-standing nanoobjects

被引：11

作者：

Chehovskiy, A. V. ^{[1
]}

Prinz, V. Ya. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Semicond Phys, Novosibirsk 630090, Russia

来源：

INTERNATIONAL JOURNAL OF NANOSCIENCE, VOL 3, NOS 1 AND 2 | 2004年 / 3卷 / 1-2期

关键词：

supercritical; drying; etching; nanotube;

D O I：

10.1142/S0219581X04001444

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

It is experimentally shown that, unlike evaporation drying, supercritical CO2 drying makes it possible to obtain free-standing single-coil InGaAs/GaAs nanotubes and other nanoshells with wall thicknesses down to 1 nm without their deformation by capillary forces. The performed process optimization has allowed us to reduce tenfold the duration of the process for long nanotubes. For the first time, etching of sacrificial AlAs layers in supercritical media was performed.

引用

页码：1 / 8

页数：8

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