Effects of annealing on titanium dioxide structured films

被引：48
作者：
Colgan, MJ [1 ]
Djurfors, B
Ivey, DG
Brett, MJ
机构：
[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada
[2] Univ Alberta, Dept Chem & Mat Engn, Edmonton, AB T6G 2G6, Canada
来源：
THIN SOLID FILMS | 2004年 / 466卷 / 1-2期
基金：
加拿大自然科学与工程研究理事会;
关键词：
titanium dioxide; annealing; glancing angle deposition; transmission electron microscopy;
D O I：
10.1016/j.tsf.2004.02.019
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Titanium dioxide is a material of interest for optically active structured films due to its high index of refraction and transparency across the visible wavelength range. A variety of films, consisting of different structures, were deposited by reactive electron beam evaporation using the glancing angle deposition process. Samples of these films were annealed at 500 degreesC for 3 hours in air. The structures of both as-deposited and annealed films were examined by scanning electron microscopy, X-ray diffractometry, and transmission electron microscopy. It was found that as-deposited films were amorphous with a very fine structure. The annealed films were found to be polycrystalline anatase and had lost their fine structure. in addition, the optical properties of the films were examined by spectrophotometric transmission measurements, wherein it was found that the annealing caused a significant transmission increase across the visible spectrum. (C) 2004 Published by Elsevier B.V.
引用
收藏
页码：92 / 96
页数：5
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