Characterization of patterned poly(methyl methacrylate) brushes under various structures upon solvent immersion

被引:43
作者
Chen, Jem-Kun [1 ]
Hsieh, Chih-Yi [2 ]
Huang, Chih-Feng [3 ]
Li, Po-min [2 ]
机构
[1] Natl Taiwan Univ Sci & Technol, Dept Polymer Engn, Taipei 106, Taiwan
[2] Natl Pingtung Univ Sci & Technol, Dept Biomechatron Engn, Pingtung, Taiwan
[3] Natl Chiao Tung Univ, Dept Appl Chem, Hsinchu, Taiwan
关键词
ATRP; Grafting density; Surface coverage; Very-large-scale integration; PMMA brush; TRANSFER RADICAL POLYMERIZATION; SELF-ASSEMBLED MONOLAYERS; SURFACE-INITIATED POLYMERIZATION; ELECTRON-BEAM LITHOGRAPHY; SILICON SURFACES; SOLID-SURFACE; QCM-D; AMPLIFICATION; POLYMERS; AFM;
D O I
10.1016/j.jcis.2009.06.040
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this paper we describe a graft polymerization/solvent immersion method for generating various patterns of polymer brushes. We used a very-large-scale integration (VLSI) process and oxygen plasma system to generate well-defined patterns of polymerized methyl methacrylate (MMA) on patterned Si(1 0 0) surfaces through atom transfer radical polymerization (ATRP). After immersion of wafers presenting lines of these PMMA brushes in water and tetrahydrofuran, we observed mushroom-and brush-like regimes through grafting densities and surface coverages, respectively, for the PMMA brushes with various pattern resolutions. In the mushroom-like regime, the distance between lines of PMMA brushes was smaller than that of the lines patterned lithographically on the wafer; in the brush-like regime, this distance was approximately the same. This new strategy allows polymer brushes to be prepared through graft polymerization and then have their patterns varied through solvent immersion. (C) 2009 Elsevier Inc. All rights reserved.
引用
收藏
页码:428 / 434
页数:7
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