Simple Analytic Relations for Estimating Parameters of the Positive Column of an Electronegative Glow Discharge in a Halogen-Containing Gas Mixture

Asymptotic analysis of the continuity equations for the positive charge plasma of a low- and moderate-pressure dc electronegative discharge is performed under the simple assumption of independence of the rates of plasma-chemical processes from coordinates. As a novelty, the ion diffusion is taken into account for the case when the ion-ion recombination dominates among the perishing mechanism of negative ions. The resultant simple analytic expressions make it possible to estimate (with an error not exceeding 15-25%) the geometrical parameters of spatial distributions of charged particle concentrations in this plasma, as well as the energy parameters, without resorting to complicated numerical simulation.