Predominant physical quantity dominating macroscopic surface shape of diamond synthesized by microwave plasma CVD

被引：27

作者：

Yamada, Hideaki ^{[1
]}

Mokuno, Yoshiaki ^{[1
]}

Chayahara, Akiyoshi ^{[1
]}

Horino, Yuji ^{[1
]}

Shikata, Shin-ichi ^{[1
]}

机构：

[1] AIST, Diamond Res Ctr, Ikeda, Osaka 5638577, Japan

来源：

DIAMOND AND RELATED MATERIALS | 2007年 / 16卷 / 03期

关键词：

microwave plasma CVD; homoepitaxial growth; single crystal diamond; simulation;

D O I：

10.1016/j.diamond.2006.11.067

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To specify the most important factor which dominates macroscopic surface shape of single crystal diamond synthesized by microwave plasma chemical vapor deposition, we have carried out numerical simulations and corresponding experiments. Comparison between the numerical and experimental results has shown that temperature distribution on the top surface of the substrate predominantly controls the surface shape. (c) 2006 Elsevier B.V. All rights reserved.

引用

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页码：576 / 580

页数：5

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