Intercolor-Filter Crosstalk Model for Image Sensors With Color Filter Array

被引:3
作者
Yamashita, Yuichiro [1 ]
Sugawa, Shigetoshi [2 ]
机构
[1] Taiwan Semicond Mfg Co Ltd, Hsinchu 30075, Taiwan
[2] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi 9808579, Japan
关键词
Buried color filter array (BCFA); color filter (CF); electrical crosstalk; image sensors; inter-CF crosstalk; isolated CF (ICF); microlens (ML); optical crosstalk;
D O I
10.1109/TED.2018.2828861
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A color crosstalk model for an area image sensor with a color filter (CF) array is proposed, which quantifies the crosstalk in a physically intuitive manner by introducing "inter-CF optical crosstalk (inter-CF crosstalk)." The model separates the structural design originated crosstalk from the CF material itself, revealing the sole characteristics of microstructures on a photo diode. A constrained nonlinear estimation is used to solve the model equation of system matrices with an objective function focusing on matching between the modeled quantum efficiency spectra and measured ones at both the peak and crosstalk regions. The model is applied to 1.1-mu m backside illuminated CMOS image sensors having four different kinds of optical structures on the photodiode of the same design, and successfully provides the ground of comparison with excellent matching between the models and the measurement results.
引用
收藏
页码:2531 / 2536
页数:6
相关论文
共 9 条
  • [1] Crosstalk and microlens study in a color CMOS image sensor
    Agranov, G
    Berezin, V
    Tsai, RH
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (01) : 4 - 11
  • [2] Alakarhu, 2007, INT IM SENS WORKSH O, P7
  • [3] Chang C.-C., 2015, P INT IM SENS WORKSH, P8
  • [4] Getman A., 2007, P INT IM SENS WORKSH, P7
  • [5] Liu J. C., 2014, IEEE COMMUNICATIONS, P186, DOI [10.1109/VLSIT.2014.6894429, DOI 10.1109/VLSIT.2014.6894429]
  • [6] Deep trench isolation for crosstalk suppression in active pixel sensors with 1.7 μm pixel pitch
    Park, Byung Jun
    Jung, Jongwan
    Moon, Chang-Rok
    Hwang, Sung Ho
    Lee, Yong Woo
    Kim, Dae Woong
    Paik, Kee Hyun
    Yoo, Jong Ryeol
    Lee, Duck Hyung
    Kim, Kinam
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (4B): : 2454 - 2457
  • [7] Taguchi H, 2011, P INT IM SENS WORKSH, P8
  • [8] Venezia V.C., 2015, INT IM SENS WORKSH V, P8
  • [9] Wuu S.G., 2010, TECH DIG INT ELECT D, V332-335, p14.1.1, DOI [10.1109/IEDM.2010.5703358, DOI 10.1109/IEDM.2010.5703358]