Measurement of form error of a probe tip ball for coordinate measuring machine (CMM) using a rotating reference sphere

被引：14

作者：

Ito, So ^{[1
]}

Tsutsumi, Daisuke ^{[1
]}

Kamiya, Kazuhide ^{[1
]}

Matsumoto, Kimihisa ^{[1
]}

Kawasegi, Noritaka ^{[2
]}

机构：

[1] Toyama Prefectural Univ, Dept Intelligent Robot, Imizu, Toyama 9300398, Japan

[2] Toyama Ind Technol Res & Dev Ctr, Toyama, Japan

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2020年 / 61卷

基金：

日本学术振兴会;

关键词：

Metrology; CMM; Diameter; Probe; Rotating sphere; Calibration;

D O I：

10.1016/j.precisioneng.2019.09.017

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This study presents a method of measurement of the form error of the tip ball in the tactile probing systems of a coordinate measuring machine (CMM) by using a rotating reference sphere. The measurement of the form error of the CMM probe tip was conducted without the use of additional external measuring instruments or sensors. The form errors of the probe tip ball and the reference sphere were separated from the probing coordinates of CMM by rotation of the reference sphere. The effectiveness of the proposed method was evaluated based on an uncertainty analysis. The uncertainty in measurement of diameter of the probe tip ball was estimated to be less than 0.5 mu m.

引用

页码：41 / 47

页数：7

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