Quality assurance in nano-scale analysis

被引：1

作者：

Senoner, M ^{[1
]}

Unger, W ^{[1
]}

Reiners, G ^{[1
]}

机构：

[1] BAM, Bundesanstalt Mat Forsch & Prufung, D-12200 Berlin, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 76卷 / 06期

关键词：

PACS: 06.20.Fn; 06.30.Bp; 07.79.Lh; 68.37.Ps; 68.65.-k; 81.07.-b; 82.80.Ms;

D O I：

10.1007/s00339-002-1976-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Some methods of nano-scale analysis are on the threshold of being a standard method in industry and therefore quality assurance becomes important. But, at the present time, there are deficits in standardisation and validation of these methods. Therefore, we have organised method comparisons and interlaboratory comparisons to overcome these deficits. We report the results of an interlaboratory comparison in step-height determination by atomic force microscopy and the development of a reference material for laterally resolving methods of material analysis.

引用

页码：919 / 921

页数：3