Effect of heavy ion irradiation on near-surface microstructure in single crystals of rutile TiO2

被引:8
作者
Li, FX
Lu, P
Ishimaru, M
Sickafus, KE [1 ]
机构
[1] New Mexico Inst Min & Technol, Socorro, NM 87801 USA
[2] Los Alamos Natl Lab, Div Mat Sci & Technol, Los Alamos, NM 87545 USA
[3] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 2000年 / 80卷 / 11期
关键词
D O I
10.1080/13642810008216517
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Radiation damage near the surface of rutile (TiO2) single crystals irradiated with 360keV Xe2+ ions has been studied by combining Rutherford backscattering spectroscopy and ion channelling (RBS/C) analyses with direct observations using transmission electron microscopy (TEM). Irradiations were performed at ambient temperature on TiO2 single crystal surfaces with (110) and (100) orientations, using ion fluences of up to 7 x 10(19) Xe ions m(-2). The RBS/C spectra revealed two damage peaks: one peak due to a surface damage layer and a second peak due to a buried damage layer near the mean projected range of the implanted ions. Cross-sectional TEM and high-resolution electron microscopy revealed that the surface damage layer consists of TiO2 crystallites with different orientations compared with the original single crystal.
引用
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页码:1947 / 1954
页数:8
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