Double modulated differential THz-TDS for thin film dielectric characterization

被引：39
作者：
Mickan, SP [1 ]
Lee, KS
Lu, TM
Munch, J
Abbott, D
Zhang, XC
机构：
[1] Rensselaer Polytech Inst, Dept Phys, Troy, NY 12180 USA
[2] Univ Adelaide, Dept Elect & Elect Engn, Ctr Biomed Engn, Adelaide, SA 5005, Australia
[3] Univ Adelaide, Dept Phys, Adelaide, SA 5005, Australia
来源：
MICROELECTRONICS JOURNAL | 2002年 / 33卷 / 12期
关键词：
terahertz; thin films; spectroscopy;
D O I：
10.1016/S0026-2692(02)00108-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Terahertz differential time-domain spectroscopy (DTDS) is a new technique that uses pulsed terahertz radiation to characterize the optical properties of thin dielectric films. Characterizing thin films in the GHz to THz range is critical for the development of new technologies in integrated circuitry, photonic systems and micro-electro-mechanical systems. There are potential applications for gene and protein chips. This paper shows how DTDS can be combined with double modulation in the pump-probe system to improve sensitivity by an order of magnitude. An iterative algorithm is presented to estimate the optical properties of a given thin film. The technique is experimentally verified using 1-mum-thick samples of silicon dioxide on silicon. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：1033 / 1042
页数：10
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